SMT 210 — Nanofabrication I (2 Credits, Fall)
Introduction to the technology used to manufacture microelectronic circuits on silicon wafers. Includes detailed descriptions of processes and equipment used in oxidation, photolithography, wet and dry etching, ion implantation, planarization, thin film deposition, and metrology. Lab activities provide hands-on practice in these processes. PRE/COREQ: MATH 143 or MATH 147 . (1 lecture hours, 2 lab hours, 2 credits)