SMT 260 — Nanofabrication II (2 Credits, Spring)
Exploration of the technology used to manufacture microelectronic circuits, focusing on full-wafer processing in a semiconductor cleanroom. Includes detailed descriptions of oxidation, deposition, photolithography, dry/wet etch, doping, and planarization. In-fab process measurements, post-fab testing, and post-fab assembly are also briefly explored. Lab activities further explore these processes, primarily via simulation and virtual reality. PREREQ: SMT 210 . PRE/COREQ: CHEM 101 or CHEM 111 . (1 lecture hours, 2 lab hours, 2 credits)