EL258 — Semiconductor Fabrication
EL 258 - Semiconductor Fabrication EL 258 - Semiconductor Fabrication This course will provide an overview of semiconductor device fabrication, including both front-end of line and back-end of line processes. Topics will include basic fabrication and yield; silicon wafer crystal structure and manufacturing; thermal processes; lithography methods; wet and dry etching; chemical and physical vapor deposition; device characterization methods; and applications to simple devices and integrated circuits. Course
Prerequisites: EL154, MT126