EL259 — Lab for EL 258
EL 259 - Lab for EL 258 EL 259 - Lab for EL 258 This course will provide an overview of the instrumentation used in the fabrication of semiconductor devices and a simple device will be fabricated and tested. Experiments will include vacuum systems; thermal processes such as dry oxide growth and diffusion in a tube furnace; photolithography; reactive ion etching; metallization via sputtering; profilometry; ellipsometry; fabrication of a PN Junction or Schottky barrier diode; and testing of the device using various characterization instruments. Course