EGEN574 — Intro to Micro/nanoelectromechanical Systems

EGEN 574 - Intro to Micro/nanoelectromechanical Systems EGEN 574 - Intro to Micro/nanoelectromechanical Systems 2 credits (Hrs: 2 Lec.) This course covers the theory and application of MEMS and NEMS from a standpoint of design, fabrication, and characterization.

Prerequisites: EGEN324, EMEC320, EGEN335