ELET250 — Vacuum and Power RF
The study of vacuum and radio frequency techniques utilized in microelectronic manufacturing applications. The vacuum areas of study include gas flow, pressure regimes, gas laws, outgassing, high vacuum production, leak and contamination detection and residual gas analysis (RGA) techniques. The power RF area of study will cover radio frequency generation, amplification, conductors and transducers and thin film deposition. Safety concerns stressed in the installation, maintenance and operation of vacuum and radio frequency equipment. Terms all Distance Learning: No Lecture: 3 Lab: 3
Prerequisites: ELET101, MATH150, PHYS135