EE4621 — Microelectronics Technology
Various fabrication processes in micro-/nano-scale semiconductor electronic and optoelectronic devices: lithography, oxidation, diffusion, thin film, deposition, etching and integration of various technologies; device simulation using COMSOL software; new materials and fabrication technologies. pre-req: EE 3235 or instructor consent, no grad credit, credit will not be granted if already received for EE 5611 or 5621.